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Volume 6; Issue 5
Main
Microsystem Technologies
Volume 6; Issue 5
Microsystem Technologies
Volume 6; Issue 5
1
High aspect ratio micromachining (HARM) technologies for microinertial devices
M. McNie
,
D. King
,
C. Vizard
,
A. Holmes
,
K. W. Lee
Journal:
Microsystem Technologies
Year:
2000
Language:
english
File:
PDF, 344 KB
Your tags:
english, 2000
2
Chemically inert membrane separator fabricated with the AMANDA-process
Z. Rummler
,
W. Bacher
,
V. Saile
,
W. K. Schomburg
Journal:
Microsystem Technologies
Year:
2000
Language:
english
File:
PDF, 195 KB
Your tags:
english, 2000
3
Fabrication of microstructure using fluorinated polyimide and silicone-based positive photoresist
T. Ito
,
R. Sawada
,
E. Higurashi
,
T. Kiyokura
Journal:
Microsystem Technologies
Year:
2000
Language:
english
File:
PDF, 503 KB
Your tags:
english, 2000
4
Metal oxide gas sensor for high temperature application
T. Gessner
,
K. Gottfried
,
R. Hoffmann
,
C. Kaufmann
,
U. Weiss
,
E. Charetdinov
,
P. Hauptmann
,
R. Lucklum
,
B. Zimmermann
,
U. Dietel
,
G. Springer
,
M. Vogel
Journal:
Microsystem Technologies
Year:
2000
Language:
english
File:
PDF, 163 KB
Your tags:
english, 2000
5
Why CMOS-integrated transducers? A review
A. Witvrouw
,
F. Van Steenkiste
,
D. Maes
,
L. Haspeslagh
,
P. Van Gerwen
,
P. De Moor
,
S. Sedky
,
C. Van Hoof
,
A. C. de Vries
,
A. Verbist
,
A. De Caussemaeker
,
B. Parmentier
,
K. Baert
Journal:
Microsystem Technologies
Year:
2000
Language:
english
File:
PDF, 248 KB
Your tags:
english, 2000
6
Net shape ceramic microcomponents by modified sol–gel casting
C. M. Chan
,
G. Z. Cao
,
T. G. Stoebe
Journal:
Microsystem Technologies
Year:
2000
Language:
english
File:
PDF, 168 KB
Your tags:
english, 2000
7
High-aspect-ratio WC-Co microstructure produced by the combination of LIGA and micro-EDM
K. Takahata
,
N. Shibaike
,
H. Guckel
Journal:
Microsystem Technologies
Year:
2000
Language:
english
File:
PDF, 208 KB
Your tags:
english, 2000
8
Alternative resist adhesion and electroplating layers for LIGA process
A. El-Kholi
,
K. Bade
,
J. Mohr
,
F. J. Pantenburg
,
X.-M. Tang
Journal:
Microsystem Technologies
Year:
2000
Language:
english
File:
PDF, 137 KB
Your tags:
english, 2000
9
Dimensional measurement of high aspect ratio micro structures with a resonating micro cantilever probe
M. Yamamoto
,
H. Takeuchi
,
S. Aoki
Journal:
Microsystem Technologies
Year:
2000
Language:
english
File:
PDF, 268 KB
Your tags:
english, 2000
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