A fabrication process for self-connected horizontal SiGe nanowires
Merhej, M., Ecoffey, S., Sadani, B., Lee–Sang, B., Baron, T., David, S., Drouin, D., Salem, B.Volume:
220
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2019.111150
Date:
February, 2020
File:
PDF, 1.23 MB
english, 2020