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Volume 220
Main
Microelectronic Engineering
Volume 220
Microelectronic Engineering
Volume 220
1
A fabrication process for self-connected horizontal SiGe nanowires
Merhej, M.
,
Ecoffey, S.
,
Sadani, B.
,
Lee–Sang, B.
,
Baron, T.
,
David, S.
,
Drouin, D.
,
Salem, B.
Journal:
Microelectronic Engineering
Year:
2020
Language:
english
File:
PDF, 1.23 MB
Your tags:
english, 2020
2
Near-field coupling derived plasmon-induced transparency and Fano dip in symmetry-broken terahertz metamaterials by the “sketch and peel” lithography process
Zhu, Xupeng
,
Zhang, Shi
,
Chen, Yiqin
,
Shi, Huimin
,
Zhou, Junhu
,
Tang, Peiren
,
Wang, Yasi
,
Yang, Dongsheng
,
Zhu, Liguo
,
Jiang, Tian
,
Quan, Jun
,
Zhang, Jun
,
Duan, Huigao
Journal:
Microelectronic Engineering
Year:
2020
Language:
english
File:
PDF, 3.30 MB
Your tags:
english, 2020
3
Hybrid DHF and N2 jet spray cleaning for silicon nitride and metal layer DRAM patterns
An, Kook-Hyun
,
Yerriboina, Nagendra Prasad
,
Poddar, Maneesh Kumar
,
Kim, Tae-Gon
,
Lee, Dong-Kyu
,
Jung, Tae-Hoon
,
Lee, Jin-Ho
,
Lee, Hun-Hee
,
Park, Jin-Goo
Journal:
Microelectronic Engineering
Year:
2020
Language:
english
File:
PDF, 1.54 MB
Your tags:
english, 2020
4
Hybrid DHF and N2 jet spray cleaning for silicon nitride and metal layer DRAM patterns
An, Kook-Hyun
,
Yerriboina, Nagendra Prasad
,
Poddar, Maneesh Kumar
,
Kim, Tae-Gon
,
Lee, Dong-Kyu
,
Jung, Tae-Hoon
,
Lee, Jin-Ho
,
Lee, Hun-Hee
,
Park, Jin-Goo
Journal:
Microelectronic Engineering
Year:
2020
File:
PDF, 1.54 MB
Your tags:
2020
5
Meta-hologram for three-dimensional display in terahertz waveband
He, Jingwen
,
Dong, Tao
,
Chi, Baihong
,
Wang, Sen
,
Wang, Xinke
,
Zhang, Yan
Journal:
Microelectronic Engineering
Year:
2020
File:
PDF, 3.34 MB
Your tags:
2020
6
Editorial Board
Journal:
Microelectronic Engineering
Year:
2020
File:
PDF, 29 KB
Your tags:
2020
1
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