A comparative study of nanostructured Silicon-Nitride...

Microelectronics Reliability 2019 / 09 Vol. 100-101

A comparative study of nanostructured Silicon-Nitride electrical properties for potential application in RF-MEMS capacitive switches

Birmpiliotis, D., Stavrinidis, G., Koutsoureli, M., Konstantinidis, G., Papaioannou, G., Ziaei, A.
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Volume:
100-101
Language:
english
Journal:
Microelectronics Reliability
DOI:
10.1016/j.microrel.2019.06.052
Date:
September, 2019
File:
PDF, 1.41 MB
english, 2019
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