Hybrid DHF and N2 jet spray cleaning for silicon nitride...

Microelectronic Engineering 2020 / 02 Vol. 220

Hybrid DHF and N2 jet spray cleaning for silicon nitride and metal layer DRAM patterns

An, Kook-Hyun, Yerriboina, Nagendra Prasad, Poddar, Maneesh Kumar, Kim, Tae-Gon, Lee, Dong-Kyu, Jung, Tae-Hoon, Lee, Jin-Ho, Lee, Hun-Hee, Park, Jin-Goo
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Volume:
220
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2019.111171
Date:
February, 2020
File:
PDF, 1.54 MB
2020
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