Electrical, Mechanical, and Structural Properties of Fluoro-Containing Poly(silsesquioxanes) Based Porous Low k Thin Films
Hyeon-Lee, Jingyu, Rhee, Jihoon, Kim, Jungbae, Yim, Jin-Heong, Chang, SeokVolume:
766
Year:
2003
Journal:
MRS Proceedings
DOI:
10.1557/PROC-766-E8.3
File:
PDF, 110 KB
2003