Impact of Annealing on the Resistivity of Ultrafine Cu...

MRS Proceedings 2003 Vol. 766

Impact of Annealing on the Resistivity of Ultrafine Cu Damascene Interconnects

Steinlesberger, G., Engelhardt, M., Schindler, G., Steinhögl, W., Traving, M., Hönlein, W., Bertagnolli, E.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
766
Year:
2003
Journal:
MRS Proceedings
DOI:
10.1557/PROC-766-E4.2
File:
PDF, 1.00 MB
2003
Conversion to is in progress
Conversion to is failed