172 nm Excimer Radiation as a Technology Accelerator for...

172 nm Excimer Radiation as a Technology Accelerator for Bio-Electronic Applications

Schäfert, Andreas, Wiesmann, Hartwig
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Volume:
255
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/ssp.255.366
Date:
September, 2016
File:
PDF, 770 KB
2016
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