Vision system-based inspection and alignment of laminated polymer films for 3D-Integration of microsystems
Elkaseer, A., Salem, M., Hagenmeyer, V., Scholz, S.Volume:
52
Year:
2019
Journal:
IFAC-PapersOnLine
DOI:
10.1016/j.ifacol.2019.11.642
File:
PDF, 1.64 MB
2019