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Towards Synchronous Mode of Multiple Independently Controlled MEMS Mirrors
Strasser, Andreas, Stelzer, Philipp, Steger, Christian, Druml, NorbertVolume:
52
Year:
2019
Journal:
IFAC-PapersOnLine
DOI:
10.1016/j.ifacol.2019.11.645
File:
PDF, 1.26 MB
2019