A Fast Piezo Actuated Tip/Tilt Mirror for raster scan applications
Csencsics, E., Sitz, B., Schitter, G.Volume:
52
Year:
2019
Journal:
IFAC-PapersOnLine
DOI:
10.1016/j.ifacol.2019.11.689
File:
PDF, 944 KB
2019