Supercritical Carbon Dioxide-based Fluids Used as a...

MRS Proceedings 2003 Vol. 766

Supercritical Carbon Dioxide-based Fluids Used as a Recovery Tool for Low-k Materials

Orozco-Teran, Rosa A., Gorman, Brian P., Zhang, Zhengping, Mueller, Dennis W., Reidy, Richard F.
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Volume:
766
Year:
2003
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-766-E6.10
File:
PDF, 377 KB
english, 2003
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