Selective growth of platinum nanolines by helium ion beam induced deposition and atomic layer deposition
Yang, Po-Shuan, Huang, Zheng-da, Huang, Kuei-Wen, Chen, Miin-JangVolume:
211
Journal:
Ultramicroscopy
DOI:
10.1016/j.ultramic.2020.112952
Date:
April, 2020
File:
PDF, 1.79 MB
2020