The characterization and preparation of porous low...

MRS Proceedings 2003 Vol. 766

The characterization and preparation of porous low dielectric films using various cyclodextrins as template materials

Yim, Jin-Heong, Kim, Jung-Bae, Jeong, Hyun-Dam, Lyu, Yi-Yeoul, Mah, Sang Kook, Hyeon-Lee, Jingyu, Lee, Kwang Hee, Chang, Seok, Pu, Lyong Sun, Hu, Y. F., Sun, J.N., Gidley, D.W.
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Volume:
766
Year:
2003
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-766-E8.10
File:
PDF, 371 KB
english, 2003
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