Three-dimensional structure recognition of circuit patterns...

Microelectronics Reliability 2020 / 05 Vol. 108

Three-dimensional structure recognition of circuit patterns on semiconductor devices using multiple SEM images detected in different electron scattering angles

Yasui, Kenji, Osaki, Mayuka, Miyamoto, Atsushi, Namai, Hitoshi
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
108
Journal:
Microelectronics Reliability
DOI:
10.1016/j.microrel.2020.113628
Date:
May, 2020
File:
PDF, 2.87 MB
2020
Conversion to is in progress
Conversion to is failed