The microstructure and electrical properties of directly...

The microstructure and electrical properties of directly deposited TiN ohmic contacts to Gallium Nitride.

Ruterana, P., Nouet, G., Kehagias, Th., Komninou, Ph., Karakostas, Th., di Forte Poisson, M.A., Huet, F.
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Volume:
5
Year:
2000
Journal:
MRS Internet Journal of Nitride Semiconductor Research
DOI:
10.1557/s1092578300005226
File:
PDF, 1.67 MB
2000
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