Fast fabrication of silicon nanopillar array using electron...

Microelectronic Engineering 2020 / 04 Vol. 227

Fast fabrication of silicon nanopillar array using electron beam lithography with two-layer exposure method

Wang, Xiaodong, Xu, Jian, Quan, Xueling, Li, Yaqian, Wang, Ying, Cheng, Xiulan
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Volume:
227
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2020.111311
Date:
April, 2020
File:
PDF, 1.50 MB
2020
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