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Volume 227
Main
Microelectronic Engineering
Volume 227
Microelectronic Engineering
Volume 227
1
Fabrication and characterization of SMA film actuator array with bias spring for high-power MEMS tactile display
Xu, Jiale
,
Kimura, Yusuke
,
Tsuji, Kazuki
,
Abe, Konomu
,
Shimizu, Tomomi
,
Hasegawa, Hiroyasu
,
Mineta, Takashi
Journal:
Microelectronic Engineering
Year:
2020
File:
PDF, 3.12 MB
Your tags:
2020
2
Design and characterization of RF MEMS capacitive shunt switch for X, Ku, K and Ka band applications
Sharma, Kuldeep
,
Karmakar, Ayan
,
Prakash, Krishna
,
Chauhan, Ashish
,
Bansal, Shonak
,
Hooda, Manish
,
Kumar, Sanjeev
,
Gupta, Neena
,
Singh, Arun K.
Journal:
Microelectronic Engineering
Year:
2020
File:
PDF, 7.50 MB
Your tags:
2020
3
Fabrication of holographic optical elements on silver by nanosecond IR laser source
Alexandropoulos, Dimitris
,
Mazzucato, Simone
,
Karoutsos, Evangelos
,
Tessaro, Carlo
,
Politi, Christina (Tanya)
,
Vainos, Nikolaos
Journal:
Microelectronic Engineering
Year:
2020
File:
PDF, 4.83 MB
Your tags:
2020
4
Passivated electrode side walls by atomic layer deposition on flexible polyimide based samples
Westerhausen, Markus
,
Martin, Tanja
,
Metzger, Michael
,
Blendinger, Felix
,
Fleischer, Monika
,
Hofmann, Boris
,
Bucher, Volker
Journal:
Microelectronic Engineering
Year:
2020
File:
PDF, 8.41 MB
Your tags:
2020
5
Compact and flexible meander antenna for Surface Acoustic Wave sensors
Marasco, I.
,
Niro, G.
,
Lamanna, L.
,
Piro, L.
,
Guido, F.
,
Algieri, L.
,
Mastronardi, V.M.
,
Qualtieri, A.
,
Scarpa, E.
,
Desmaële, D.
,
Rizzi, F.
,
D'Orazio, A.
,
De Vittorio, M.
,
Grande, M.
Journal:
Microelectronic Engineering
Year:
2020
File:
PDF, 4.27 MB
Your tags:
2020
6
Effect of concentration change of 0.1% triton added 25Â wt% TMAH during fabrication of deep cavities with mesa structures in SOI wafer
Menon, P. Krishna
,
Ashok, Akarapu
,
Rao, A.V. Narasimha
,
Pandey, Ashok Kumar
,
Pal, Prem
Journal:
Microelectronic Engineering
Year:
2020
File:
PDF, 1.47 MB
Your tags:
2020
7
Study on effect of complexing agents on Co oxidation/dissolution for chemical-mechanical polishing and cleaning process
Kwon, Ohsung
,
Bae, KiHo
,
Byun, Jinuk
,
Lim, Taeho
,
Kim, Jae Jeong
Journal:
Microelectronic Engineering
Year:
2020
File:
PDF, 1.34 MB
Your tags:
2020
8
Cryogenic etching for pattern transfer into silicon of Mix-and-Match structured resist layers
Weidenfeller, Laura
,
Hofmann, Martin
,
Supreeti, Shraddha
,
Mechold, Stephan
,
Holz, Mathias
,
Reuter, Christoph
,
Manske, Eberhard
,
Rangelow, Ivo W.
Journal:
Microelectronic Engineering
Year:
2020
File:
PDF, 1.07 MB
Your tags:
2020
9
A study of nano-structural effect on the polarization characteristics of metallic sub-wavelength grating polarizers in visible wavelengths
Yang, Zongyao
,
Feng, Bo
,
Lu, Bingrui
,
Chen, Yifang
,
Li, Wenhao
,
Zhang, Wei
,
Li, Tao
Journal:
Microelectronic Engineering
Year:
2020
File:
PDF, 1.78 MB
Your tags:
2020
10
Machine learning based technique towards smart laser fabrication of CGH
Anastasiou, Aggeliki
,
Zacharaki, Evangelia I.
,
Alexandropoulos, Dimitris
,
Moustakas, Konstantinos
,
Vainos, Nikolaos A.
Journal:
Microelectronic Engineering
Year:
2020
File:
PDF, 1.37 MB
Your tags:
2020
11
Numerical method for optimization of thermal cycling in 3D-printed polymerase chain reaction device
Park, Jaehyun
,
Park, Heesung
Journal:
Microelectronic Engineering
Year:
2020
File:
PDF, 2.14 MB
Your tags:
2020
12
Fast fabrication of silicon nanopillar array using electron beam lithography with two-layer exposure method
Wang, Xiaodong
,
Xu, Jian
,
Quan, Xueling
,
Li, Yaqian
,
Wang, Ying
,
Cheng, Xiulan
Journal:
Microelectronic Engineering
Year:
2020
File:
PDF, 1.50 MB
Your tags:
2020
13
Descumming fluorous solution for photolithographic patterning of organic light-emitting diodes
Son, Jongchan
,
Shin, Han Young
,
Choi, Yu Min
,
Chae, Seung Gun
,
Park, Chunhee
,
Jung, Byung Jun
,
Lee, Jin-Kyun
Journal:
Microelectronic Engineering
Year:
2020
File:
PDF, 1.92 MB
Your tags:
2020
14
Direct Monte-Carlo simulation of dry e-beam etching of resist
Sidorov, F.
,
Rogozhin, A.
,
Bruk, M.
,
Zhikharev, E.
Journal:
Microelectronic Engineering
Year:
2020
File:
PDF, 738 KB
Your tags:
2020
15
Editorial Board
Journal:
Microelectronic Engineering
Year:
2020
File:
PDF, 29 KB
Your tags:
2020
1
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