Descumming fluorous solution for photolithographic...

Microelectronic Engineering 2020 / 04 Vol. 227

Descumming fluorous solution for photolithographic patterning of organic light-emitting diodes

Son, Jongchan, Shin, Han Young, Choi, Yu Min, Chae, Seung Gun, Park, Chunhee, Jung, Byung Jun, Lee, Jin-Kyun
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Volume:
227
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2020.111324
Date:
April, 2020
File:
PDF, 1.92 MB
2020
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