Analysis and experimental comparison of range-based control for dual-stage nanopositioners
Mitrovic, Aleksandra, Leang, Kam K., Clayton, Garrett M.Volume:
69
Journal:
Mechatronics
DOI:
10.1016/j.mechatronics.2020.102371
Date:
August, 2020
File:
PDF, 8.56 MB
2020