Development of Accurate Prediction Technology of Material Removal Rate Distribution in Planarization CMP; å¹³å¦åCMPã«ãããé«ç²¾åº¦ç 磨ã¬ã¼ãåå¸æ¨å®æè¡ã®éçº;
SUZUKI, Norikazu, HASHIMOTO, YoheiVolume:
84
Year:
2018
Journal:
Journal of the Japan Society for Precision Engineering
DOI:
10.2493/jjspe.84.221
File:
PDF, 1.89 MB
2018