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Volume 84; Issue 3
Main
Journal of the Japan Society for Precision Engineering
Volume 84; Issue 3
Journal of the Japan Society for Precision Engineering
Volume 84; Issue 3
1
第1回 置かれた場所で咲こうとしました(1)
KIYONO, Satoshi
Journal:
Journal of the Japan Society for Precision Engineering
Year:
2018
File:
PDF, 336 KB
Your tags:
2018
2
Precision Finishing and Fracture Strength of Ultra-Low Thermal Expansion Glass-Ceramics and Their Sintered Bodies for Ultra-Precision Applications; 超精密機器に使われる極低熱膨張ガラスセラミックスとその焼結体の表面仕上げと破壊特性;
NAGANO, Yasuo
,
TAKEHARA, Hiroshi
,
NAMBA, Yoshiharu
Journal:
Journal of the Japan Society for Precision Engineering
Year:
2018
File:
PDF, 2.89 MB
Your tags:
2018
3
Self-assembly of ZnO Particles and Subsequent Hydrothermal Crystal Growth to Produce ZnO Urchin-like Structure and Its Application to Gas Sensor; 自己整列微粒子を核とした水熱合成による酸化亜鉛ウニ状マイクロ構造の作製とガスセンサへの応用;
MORONUKI, Nobuyuki
,
OKUBO, Yuji
Journal:
Journal of the Japan Society for Precision Engineering
Year:
2018
File:
PDF, 2.21 MB
Your tags:
2018
4
A Two-Degree-of-Freedom Micro Electromagnetic Actuator Utilizing a Fine Pitch and Multi-Pole Magnetized Permanent Magnet; 微小多極着磁磁石を用いた2自由度マイクロ電磁アクチュエータの試作;
AZUMA, Noriei
,
TANAKA, Shunya
,
FUJIWARA, Ryogen
,
SHINSHI, Tadahiko
,
SUZUKI, Kenichi
Journal:
Journal of the Japan Society for Precision Engineering
Year:
2018
File:
PDF, 2.15 MB
Your tags:
2018
5
JSPE Affiliate News; アフィリエイト通信;
Journal:
Journal of the Japan Society for Precision Engineering
Year:
2018
File:
PDF, 1.31 MB
Your tags:
2018
6
Preparation of Water-Repellent Monomolecular Films by CF4 Plasma Treatment on Hydrocarbon Monolayers; 炭化水素系化学吸着単分子膜の四フッ化炭素プラズマ処理による撥水性単分子膜の作製;
MA, Xiaoyuan
,
OGAWA, Kazufumi
,
SUZAKI, Yoshifumi
Journal:
Journal of the Japan Society for Precision Engineering
Year:
2018
File:
PDF, 1.78 MB
Your tags:
2018
7
世界をリードする半導体デバイス用CMP装置メーカー
KATSUOKA, Seiji
,
KONDO, Seiichi
Journal:
Journal of the Japan Society for Precision Engineering
Year:
2018
File:
PDF, 2.33 MB
Your tags:
2018
8
Study on Thermal Contact Conductance in Vacuum; 真空中における接触熱コンダクタンスに関する研究;
TANDOU, Takumi
,
MINORIKAWA, Gaku
Journal:
Journal of the Japan Society for Precision Engineering
Year:
2018
File:
PDF, 1.76 MB
Your tags:
2018
9
Optimization of Polishing Conditions for Reducing Thickness Variation of Wafer in Double-Sided Polishing; 両面研磨加工におけるウェーハ厚さむら抑制のための加工条件最適化;
FUKUI, Katsunari
,
HIROSE, Kenji
,
SATAKE, Urara
,
ENOMOTO, Toshiyuki
,
SUGIHARA, Tatsuya
Journal:
Journal of the Japan Society for Precision Engineering
Year:
2018
File:
PDF, 4.76 MB
Your tags:
2018
10
Helium and Oxygen Plasma Treatment on ZnO Thin Films Fabricated Using Atmospheric Cold Plasma; 大気圧低温プラズマを用いて作製したZnO薄膜へのヘリウムと酸素のプラズマによる表面処理;
MA, Xiaoyuan
,
TODO, Takuya
,
SUZAKI, Yoshifumi
Journal:
Journal of the Japan Society for Precision Engineering
Year:
2018
File:
PDF, 1.89 MB
Your tags:
2018
11
Thickness Control Technology for CMP Process; CMPプロセスの膜厚制御技術;
WATANABE, Katsuhide
Journal:
Journal of the Japan Society for Precision Engineering
Year:
2018
File:
PDF, 1.28 MB
Your tags:
2018
12
Polishing Technique of Next-Generation Power Semiconductor SiC Substrate; 次世代パワーデバイス用SiC基板の研磨技術;
SANO, Yasuhisa
Journal:
Journal of the Japan Society for Precision Engineering
Year:
2018
File:
PDF, 673 KB
Your tags:
2018
13
The Overview and Future Prospects for Planarization CMP Technology; 半導体プラナリゼーションCMP技術の展望;
KUROKAWA, Syuhei
Journal:
Journal of the Japan Society for Precision Engineering
Year:
2018
File:
PDF, 749 KB
Your tags:
2018
14
The Overview and Future Prospects for Planarization CMP Technology; 半導体プラナリゼーションCMP技術の展望;
KUROKAWA, Syuhei
Journal:
Journal of the Japan Society for Precision Engineering
Year:
2018
File:
PDF, 749 KB
Your tags:
2018
15
Robot Application of High-Speed Visual Feedback Control; 高速視覚フィードバック制御のロボット応用;
NAMIKI, Akio
Journal:
Journal of the Japan Society for Precision Engineering
Year:
2018
File:
PDF, 2.11 MB
Your tags:
2018
16
Polishing Mechanism Analysis Based on Visualizing of Consumables Effect; ç 磨ã®ãè¦ããåãã«åºã¥ãã¡ã«ããºã åæã¸ã®ã¢ããã¼ã;
UNEDA, Michio
Journal:
Journal of the Japan Society for Precision Engineering
Year:
2018
File:
PDF, 1.24 MB
Your tags:
2018
17
Development of Accurate Prediction Technology of Material Removal Rate Distribution in Planarization CMP; å¹³å¦åCMPã«ãããé«ç²¾åº¦ç 磨ã¬ã¼ãåå¸æ¨å®æè¡ã®éçº;
SUZUKI, Norikazu
,
HASHIMOTO, Yohei
Journal:
Journal of the Japan Society for Precision Engineering
Year:
2018
File:
PDF, 1.89 MB
Your tags:
2018
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