Fabrication of GaN with Buried Tungsten (W) Structures Using Epitaxial Lateral Overgrowth (ELO) via LP-MOVPE
Miyake, Hideto, Yamaguchi, Motoo, Haino, Masahiro, Motogaito, Atsushi, Hiramatsu, Kazumasa, Nambu, Shingo, Kawaguchi, Yasutoshi, Sawaki, Nobuhiko, Iyechika, Yasushi, Maeda, Takayoshi, Akasaki, IsamuVolume:
5
Year:
2000
Journal:
MRS Internet Journal of Nitride Semiconductor Research
DOI:
10.1557/s1092578300004087
File:
PDF, 175 KB
2000