Determination of Elastic Modulus of Silicon Carbide (SiC)...

Journal of Microelectromechanical Systems 2020 / 10 Vol. 29; Iss. 5

Determination of Elastic Modulus of Silicon Carbide (SiC) Thin Diaphragms via Mode-Dependent Duffing Nonlinear Resonances

Chen, Hailong, Jia, Hao, Zorman, Christian A., Feng, Philip X.-L.
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Volume:
29
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2020.3020568
Date:
October, 2020
File:
PDF, 2.42 MB
2020
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