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Volume 29; Issue 5
Main
Journal of Microelectromechanical Systems
Volume 29; Issue 5
Journal of Microelectromechanical Systems
Volume 29; Issue 5
1
AFM Microcantilever With a Collocated AlN Sensor-Actuator Pair: Enabling Efficient Q-Control for Dynamic Imaging
Mahdavi, Mohammad
,
Nikooienejad, Nastaran
,
Moheimani, S. O. Reza
Journal:
Journal of Microelectromechanical Systems
Year:
2020
File:
PDF, 3.63 MB
Your tags:
2020
2
The Model of Etch Rates of Crystallographic Planes of Sapphire Based on Step Flow Mechanism
Wu, Guorong
,
Xing, Yan
Journal:
Journal of Microelectromechanical Systems
Year:
2020
File:
PDF, 4.72 MB
Your tags:
2020
3
An 8-Bit Digitally Operated Micromachined Accelerometer
Abbasalipour, Amin
,
Nikfarjam, Hamed
,
Pourkamali, Siavash
Journal:
Journal of Microelectromechanical Systems
Year:
2020
File:
PDF, 1.28 MB
Your tags:
2020
4
Direct Laser Writing for Deterministic Lateral Displacement of Submicron Particles
Alsharhan, Abdullah T.
,
Stair, Anthony J.
,
Acevedo, Ruben
,
Razaulla, Talha
,
Warren, Roseanne
,
Sochol, Ryan D.
Journal:
Journal of Microelectromechanical Systems
Year:
2020
File:
PDF, 18.48 MB
Your tags:
2020
5
Accurate 3D Lighthouse Localization of a Low-Power Crystal-Free Single-Chip Mote
Kilberg, Brian G.
,
Campos, Felipe Mulinari Rocha
,
Maksimovic, Filip
,
Watteyne, Thomas
,
Pister, Kristofer S. J.
Journal:
Journal of Microelectromechanical Systems
Year:
2020
File:
PDF, 1.85 MB
Your tags:
2020
6
Determination of Elastic Modulus of Silicon Carbide (SiC) Thin Diaphragms via Mode-Dependent Duffing Nonlinear Resonances
Chen, Hailong
,
Jia, Hao
,
Zorman, Christian A.
,
Feng, Philip X.-L.
Journal:
Journal of Microelectromechanical Systems
Year:
2020
File:
PDF, 2.42 MB
Your tags:
2020
7
Limits to Thermal-Piezoresistive Cooling in Silicon Micromechanical Resonators
Miller, James M. L.
,
Zhu, Haoshen
,
Sundaram, Subramanian
,
Vukasin, Gabrielle D.
,
Chen, Yunhan
,
Flader, Ian B.
,
Shin, Dongsuk D.
,
Kenny, Thomas W.
Journal:
Journal of Microelectromechanical Systems
Year:
2020
File:
PDF, 3.05 MB
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2020
8
Table of contents
Journal:
Journal of Microelectromechanical Systems
Year:
2020
File:
PDF, 327 KB
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2020
9
IEEE JMEMS Special Proceeding for the Hilton Head 2020 Workshop
Ghodssi, Reza
,
Rais-Zadeh, Mina
,
Sochol, Ryan
Journal:
Journal of Microelectromechanical Systems
Year:
2020
File:
PDF, 598 KB
Your tags:
2020
10
IEEE Access
Journal:
Journal of Microelectromechanical Systems
Year:
2020
File:
PDF, 512 KB
Your tags:
2020
11
TechRxiv: Share Your Preprint Research with the World!
Journal:
Journal of Microelectromechanical Systems
Year:
2020
File:
PDF, 369 KB
Your tags:
2020
12
A Self-Powered, Biodegradable Dissolved Oxygen Microsensor
She, Didi
,
Allen, Mark G.
Journal:
Journal of Microelectromechanical Systems
Year:
2020
File:
PDF, 863 KB
Your tags:
2020
1
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