Doping level anomalies resulting from exposure to dopant precursors during cooling in MOVPE
S. Cole, L. Davis, W.J. Duncan, E.M. Marsh, R.H. Moss, W.J.M. Rothwell, P.J. Skevington, G.D.T. SpillerVolume:
107
Year:
1991
Language:
english
Pages:
5
DOI:
10.1016/0022-0248(91)90466-i
File:
PDF, 307 KB
english, 1991