Epitaxial growth of GaAs with (C2H5)2GaCl and AsH3 in a hot-wall system
N.I. Buchan, T.F. Kuech, M.A. Tischler, R. PotemskiVolume:
107
Year:
1991
Language:
english
Pages:
6
DOI:
10.1016/0022-0248(91)90479-o
File:
PDF, 394 KB
english, 1991