A medium energy facility for variable temperature...

Nuclear Instruments and Methods in Physics Research 1981 Vol. 189; Iss. 1

A medium energy facility for variable temperature implantation and analysis

Jacques Chaumont, François Lalu, Michel Salome, Anne-Marie Lamoise, Harry Bernas
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Volume:
189
Year:
1981
Language:
english
Pages:
6
DOI:
10.1016/0029-554x(81)90145-2
File:
PDF, 399 KB
english, 1981
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