Volume 189; Issue 1

1

Editorial Board

Year:
1981
Language:
english
File:
PDF, 27 KB
english, 1981
2

Editorial

Year:
1981
Language:
english
File:
PDF, 203 KB
english, 1981
4

Beam optics design for ion implantation

Year:
1981
Language:
english
File:
PDF, 555 KB
english, 1981
6

Magnet optics for beam transport

Year:
1981
Language:
english
File:
PDF, 690 KB
english, 1981
7

Ion extraction and optics arithmetic

Year:
1981
Language:
english
File:
PDF, 1.42 MB
english, 1981
8

Electrical rotation of quadrupole lenses

Year:
1981
Language:
english
File:
PDF, 280 KB
english, 1981
9

Production of high-current metal ion beams

Year:
1981
Language:
english
File:
PDF, 232 KB
english, 1981
10

The Frankfurt PIG ion source

Year:
1981
Language:
english
File:
PDF, 295 KB
english, 1981
16

Experiments on gas cooling of wafers

Year:
1981
Language:
english
File:
PDF, 315 KB
english, 1981
17

Ion implantation in semiconductor processing

Year:
1981
Language:
english
File:
PDF, 583 KB
english, 1981
20

Low cost molecular ion implantation equipment

Year:
1981
Language:
english
File:
PDF, 312 KB
english, 1981
21

Pulsed CV system for ion implantation control

Year:
1981
Language:
english
File:
PDF, 408 KB
english, 1981
22

Electromagnetic scanning systems

Year:
1981
Language:
english
File:
PDF, 775 KB
english, 1981
23

Target chambers for ion implantation using mechanical scanning

Year:
1981
Language:
english
File:
PDF, 1.11 MB
english, 1981
24

A microprocessor-based beam sweep control unit

Year:
1981
Language:
english
File:
PDF, 401 KB
english, 1981
25

Some considerations on target chamber design

Year:
1981
Language:
english
File:
PDF, 370 KB
english, 1981
26

Equipment for accurate ion collection of high areal uniformity

Year:
1981
Language:
english
File:
PDF, 238 KB
english, 1981
28

A new dose control technique for ion implantation

Year:
1981
Language:
english
File:
PDF, 901 KB
english, 1981
33

Electrostatic ion optics and beam transport for ion implantation

Year:
1981
Language:
english
File:
PDF, 1.33 MB
english, 1981
35

Advances in molten metal field ion sources

Year:
1981
Language:
english
File:
PDF, 437 KB
english, 1981
38

Fast target heating system for ion implantation

Year:
1981
Language:
english
File:
PDF, 251 KB
english, 1981
42

Dosimetry measurement in ion implanters

Year:
1981
Language:
english
File:
PDF, 828 KB
english, 1981
44

A high-throughput mechanically scanned target chamber

Year:
1981
Language:
english
File:
PDF, 797 KB
english, 1981