Study of CaF2 growth on Si, a-Si O2 by in-situ spectroscopic ellipsometry
J. Rivory, S. Fisson, V. Nguyen Van, G. Vuye, Y. Wang, F. Abelés, K. Yu-ZhangVolume:
233
Year:
1993
Language:
english
Pages:
4
DOI:
10.1016/0040-6090(93)90103-v
File:
PDF, 464 KB
english, 1993