Silicon monolayer growth using dichlorosilane and hydrogen...

Silicon monolayer growth using dichlorosilane and hydrogen in a near atmospheric pressure chemical vapor deposition reactor

F.G. McIntosh, P.C. Colter, S.M. Bedair
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
225
Year:
1993
Language:
english
Pages:
4
DOI:
10.1016/0040-6090(93)90152-f
File:
PDF, 354 KB
english, 1993
Conversion to is in progress
Conversion to is failed