Emission line intensities in an r.f. sputtering glow discharge system
J.L. Hernández-Rojas, M.L. Lucía, J. Santamaría, G. Gonzáles-Díaz, I. Mártil, F. Sánchez-QuesadaVolume:
228
Year:
1993
Language:
english
Pages:
4
DOI:
10.1016/0040-6090(93)90581-9
File:
PDF, 321 KB
english, 1993