Transformation of titanium nitride in oxygen plasma
C. Jiménez, J. Perrière, C. Palacio, J.P. Enard, J.M. AlbellaVolume:
228
Year:
1993
Language:
english
Pages:
5
DOI:
10.1016/0040-6090(93)90609-s
File:
PDF, 360 KB
english, 1993