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Comparative study of trimethylboron doping of hot filament chemically vapour deposited and microwave plasma chemically vapour deposited diamond films
M.C. Polo, J. Cifre, J. Puigdollers, J. EsteveVolume:
253
Year:
1994
Language:
english
Pages:
5
DOI:
10.1016/0040-6090(94)90308-5
File:
PDF, 397 KB
english, 1994