Comparative study of trimethylboron doping of hot filament...

Comparative study of trimethylboron doping of hot filament chemically vapour deposited and microwave plasma chemically vapour deposited diamond films

M.C. Polo, J. Cifre, J. Puigdollers, J. Esteve
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Volume:
253
Year:
1994
Language:
english
Pages:
5
DOI:
10.1016/0040-6090(94)90308-5
File:
PDF, 397 KB
english, 1994
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