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The effects of collimation on intrinsic stress in sputter-deposited metallic thin films
T. Janacek, D. Liu, S.K. Dew, M.J. Brett, T.J. SmyVolume:
253
Year:
1994
Language:
english
Pages:
5
DOI:
10.1016/0040-6090(94)90350-6
File:
PDF, 430 KB
english, 1994