Structural and optical characterization of β-FeSi2 layers on Si formed by ion beam synthesis
N. Kobayashi, H. Katsumata, H.L. Shen, M. Hasegawa, Y. Makita, H. Shibata, S. Kimura, A. Obara, S. Uekusa, T. HatanoVolume:
270
Year:
1995
Language:
english
Pages:
5
DOI:
10.1016/0040-6090(95)06723-x
File:
PDF, 512 KB
english, 1995