Structural and optical characterization of β-FeSi2 layers...

Structural and optical characterization of β-FeSi2 layers on Si formed by ion beam synthesis

N. Kobayashi, H. Katsumata, H.L. Shen, M. Hasegawa, Y. Makita, H. Shibata, S. Kimura, A. Obara, S. Uekusa, T. Hatano
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Volume:
270
Year:
1995
Language:
english
Pages:
5
DOI:
10.1016/0040-6090(95)06723-x
File:
PDF, 512 KB
english, 1995
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