Collimated TiTiN contact and barrier layers for sub 0.5 μm...

Collimated TiTiN contact and barrier layers for sub 0.5 μm CVD W-filled contact holes

M. Biberger, S. Jackson, G. Tkach, J. Schlueter, B. Jones, C.K. Huang, Luc Ouellet
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Volume:
270
Year:
1995
Language:
english
Pages:
4
DOI:
10.1016/0040-6090(95)06847-3
File:
PDF, 462 KB
english, 1995
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