Collimated TiTiN contact and barrier layers for sub 0.5 μm CVD W-filled contact holes
M. Biberger, S. Jackson, G. Tkach, J. Schlueter, B. Jones, C.K. Huang, Luc OuelletVolume:
270
Year:
1995
Language:
english
Pages:
4
DOI:
10.1016/0040-6090(95)06847-3
File:
PDF, 462 KB
english, 1995