Precursor gas effect on the mechanical and optical properties of ion beam deposited diamond-like carbon films
Je Uk Oh, Kwang-Ryeol Lee, Kwang Yong EunVolume:
270
Year:
1995
Language:
english
Pages:
4
DOI:
10.1016/0040-6090(95)06890-2
File:
PDF, 458 KB
english, 1995