Chemical mechanical polishing of PSG and BPSG dielectric films: the effect of phosphorus and boron concentration
Chi-Wen Liu, Bau-Tong Dai, Ching-Fa YehVolume:
270
Year:
1995
Language:
english
Pages:
5
DOI:
10.1016/0040-6090(95)07088-5
File:
PDF, 514 KB
english, 1995