A new media and concept of direct writing patterns by...

Microelectronic Engineering 1983 Vol. 1; Iss. 2

A new media and concept of direct writing patterns by electron beam

G.V. Saparin, S.K. Obyden, M.V. Chukhichev, S.I. Popov
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Volume:
1
Year:
1983
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(83)90028-x
File:
PDF, 248 KB
english, 1983
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