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Volume 1; Issue 2
Main
Microelectronic Engineering
Volume 1; Issue 2
Microelectronic Engineering
Volume 1; Issue 2
1
Editorial
William Nixon
Journal:
Microelectronic Engineering
Year:
1983
Language:
english
File:
PDF, 43 KB
Your tags:
english, 1983
2
Irradiation effects on passivated NMOS-transistors caused by electron beam testing
S. Görlich
,
E. Kubalek
Journal:
Microelectronic Engineering
Year:
1983
Language:
english
File:
PDF, 653 KB
Your tags:
english, 1983
3
The spatial resolution limit of electron lithography
David C. Joy
Journal:
Microelectronic Engineering
Year:
1983
Language:
english
File:
PDF, 1.22 MB
Your tags:
english, 1983
4
High voltage electron beam lithography
Tadahiro Takigawa
,
Katsuhiro Kawabuchi
,
Makoto Yoshimi
,
Yoshihide Kato
Journal:
Microelectronic Engineering
Year:
1983
Language:
english
File:
PDF, 1.54 MB
Your tags:
english, 1983
5
Microanalysis for microelectronics
E. Fuchs
Journal:
Microelectronic Engineering
Year:
1983
Language:
english
File:
PDF, 1.85 MB
Your tags:
english, 1983
6
Epitaxial spinel growth for integrated circuits
Masaru Ihara
Journal:
Microelectronic Engineering
Year:
1983
Language:
english
File:
PDF, 1.94 MB
Your tags:
english, 1983
7
A new media and concept of direct writing patterns by electron beam
G.V. Saparin
,
S.K. Obyden
,
M.V. Chukhichev
,
S.I. Popov
Journal:
Microelectronic Engineering
Year:
1983
Language:
english
File:
PDF, 248 KB
Your tags:
english, 1983
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