Sub-100 nm electronic devices and quantum-effects research...

Sub-100 nm electronic devices and quantum-effects research using x-ray nanolithography

Henry I. Smith, K. Ismail, M.L. Schattenburg, D.A. Antoniadis
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Volume:
11
Year:
1990
Language:
english
Pages:
7
DOI:
10.1016/0167-9317(90)90072-2
File:
PDF, 591 KB
english, 1990
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