Sub-100 nm electronic devices and quantum-effects research using x-ray nanolithography
Henry I. Smith, K. Ismail, M.L. Schattenburg, D.A. AntoniadisVolume:
11
Year:
1990
Language:
english
Pages:
7
DOI:
10.1016/0167-9317(90)90072-2
File:
PDF, 591 KB
english, 1990