The impact of thin film interference effects on sub-micron lithography processing.
G.D. Maxwell, A.J.W. Tol, F.A. Vollenbroek, Y.F. RodyVolume:
11
Year:
1990
Language:
english
Pages:
6
DOI:
10.1016/0167-9317(90)90100-8
File:
PDF, 440 KB
english, 1990