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SiC mask membrane for synchrotron radiation lithography
M. Kobayashi, M. Sugawara, K. Yamashiro, Y. YamaguchiVolume:
11
Year:
1990
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(90)90105-3
File:
PDF, 374 KB
english, 1990