The effect of SR x-ray lithography on MOS gate oxide and 0.5μm p-channel MOSFET's
U. Mackens, A.J. WalkerVolume:
11
Year:
1990
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(90)90113-8
File:
PDF, 311 KB
english, 1990