Experimental study on proximity effects in high voltage e-beam lithography
E. Boere, E. van der Drift, J. Romijn, B. RousseeuwVolume:
11
Year:
1990
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(90)90128-g
File:
PDF, 390 KB
english, 1990