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High-resolution focused ion beam lithography
Shinji Matsui, Yoshikatsu Kojima, Yukinori Ochiai, Toshiyuki Honda, Katsumi SuzukiVolume:
11
Year:
1990
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(90)90144-i
File:
PDF, 572 KB
english, 1990