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Oxidation of TaSi2 thin films on polycrystalline Si
T.A. Nguyen Tan, N. Guerfi, J.Y. Veuillen, J. DerrienVolume:
41-42
Year:
1989
Language:
english
Pages:
6
DOI:
10.1016/0169-4332(89)90068-8
File:
PDF, 478 KB
english, 1989