Methods for the fabrication of convex corners in anisotropic etching of (100) silicon in aqueous KOH
H.L. Offereins, K. Kühl, H. SandmaierVolume:
25
Year:
1990
Language:
english
Pages:
5
DOI:
10.1016/0924-4247(90)87002-z
File:
PDF, 1.22 MB
english, 1990