Atomic scale simulation of silicon etched in aqueous KOH...

Atomic scale simulation of silicon etched in aqueous KOH solution

H. Camon, Z. Moktadir
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Volume:
46
Year:
1995
Pages:
3
DOI:
10.1016/0924-4247(94)00854-b
File:
PDF, 307 KB
1995
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